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Plate PECVD loading -unloading machine
Product features
Maximum capacity up to 6000pcs/h
Simple and stable structure
Can be customized according to different demand
Technical parameters | |
|---|---|
| Technical parameters | Related parameters |
| Machine capacity | 4000 /6000 pcs/h(Can be customized) |
| Carbon frame distance | 10*10(5*5, 5*6, 8*10, 9*10 optional) |
| Wafer size | 166mm-210mm |
| Broken rate | ≤0.02% |
| Uptime | ≥98% |
| Power | 15kW |
| Air consumption | 500L/min |
| The specific parameters are subject to change without notice. | |
