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ALD loading -unloading machine
Product features
Maximum capacity up to 16000pcs/h
Can be customized
Stable operation with specialized precision ceramic suction cups, ceramic top teeth, ceramic side teeth to reduce wafer scratches
Technical Parameters | |
|---|---|
| Technical Parameters | Related parameters |
| Capacity | 8000/11000/16000 pcs/h |
| Metal Boat Dimension | 200 slots, 2.38mm pitch |
| Wafer size | 166mm-210mm |
| Suitable cassette | 100 cassette |
| Fragmentation rate | ≤0.03% |
| Uptime | ≥98% |
| Air consumption | 1000L/min |
| The specific parameters are subject to change without notice. | |
