Maximum capacity up to 16000pcs/h
Can be customized
Stable operation with specialized precision ceramic suction cups, ceramic top teeth, ceramic side teeth to reduce wafer scratches
Technical Parameters | |
---|---|
Technical Parameters | Related parameters |
Capacity | 8000/11000/16000 pcs/h |
Quartz Boat Dimension | 1000/1200/1600 slots, pitch 2.38mm |
Wafer size | 166mm-210mm |
Suitable cassette | 100 cassette |
Fragmentation rate | ≤0.03% |
Uptime | ≥98% |
Air consumption | 1000L/min |
The specific parameters are subject to change without notice. |