Evaporative Plating Line
Vacuum transition classifies as three stage of 1000Pa, 1Pa and 10-4Pa, different from 10Pa, 10-4Pa two-stage model. It optimizes pumping efficiency of Roots pump in 1000Pa ~ 1Pa, which saves costs by reducing the equipment configuration of the pumping unit of the low-vacuum section and the energy consumption of the equipment.
The use of low-temperature pumps for the collection of water vapor during the delivery of samples before coating has high pumping efficiency and reduces humidity requirements for the equipment site, leading to reduced investment in production and construction.
Linear source with integrated heating and modular crucible splicing design, crucible individual size is small with very small thermal deformation, crucible position can be adjusted with the role of coating uniformity adjustment.
Technical Parameters | |
|---|---|
| Equipment Model | ZDX-300（600、1200） |
| Ultimate Vacuum | 8×10-5Pa |
| Functional Classification of Chambers | Sample inlet and outlet chambers(1000 Pa) |
| Low vacuum transition chamber(1 Pa) | |
| High vacuum transition chamber(5×10-4Pa) | |
| High vacuum transition chamber(5×10-4Pa) | |
| Evaporation Source Type | Linear source: room temperature ~ 700°C,water cooling |
| Evaporation Distance | 120~300mm |
Technical Parameters | |
|---|---|
| Sample width | 300、600、1200mm |
| Commonly Used Evaporation Materials | C60、BCP、LiF、PbI2、CsBr、Cu等 |
| Coating Beat | ≥60s |
| Continuous Running Time | ≥300h |
| ≥50h（C60、1A/s） | |
| Film Thickness Uniformity | ≤±5% |
| Coating Rate Stability | ≤±0.1A/s |
| Sample Temperature During Coating | ≤60℃ |
Technical Advantages |
|---|
| Evaporative coating equipment for electron transport layer(C60) |
| Aiming at the influence of adsorbed oxygen and water vapor of C60 evaporation material on the stability of evaporation, pre-evaporation treatment and deep-cooling collection are carried out in the coating room to improve the stability of C60 evaporation temperature and prolong the continuous coating time. |
| Linear source based on the C60 characteristics, the evaporation port is used in an unobstructed way, the evaporation rate is faster, the condensation carrier area is reduced, and the stability is better. |
Technical Advantages |
|---|
| Co-evaporation coating equipment for chalcogenide layers |
| Compatible with 2-3 sources co-evaporation |
| The co-evaporation source has two working modes, synchronized hybrid coating and layered alternating coating, which provides better compatibility and co-evaporation effect for different physical properties of materials. |
| Linear source mask with porous, slit, wide slit and other diversified structural modes, for the physical properties of different materials can be solved: sample cooling, reduce mask condensation, evaporation efficiency regulation, dispersion angle regulation and other issues. |
