High-efficiency solar module equipment & solutionHigh-efficiency solar cell equipment & solutionCalcite Vapor Deposition EquipmentHigh-efficiency hydrogen intelligent manufacturing equipment
Small Laboratory Equipment (Evaporation/Magnetization)
Product features
Technical Parameters | |
|---|---|
| Equipment Model | ZZDS500 Evaporative Coating Glovebox System |
| Ultimate Vacuum | 5×10-5Pa |
| Pumping Speed | Atmosphere~5×10-4Pa≤15min |
| Evaporative Source | 6,any combination of metal/organic quantities |
| Evaporation Source Type | Evaporation boats or organic, metal beam source furnaces |
| Sample Size | 210×210mm, backward compatible |
| Film Thickness Uniformity | ≤±3% |
| Uniformity Determination | （Tmax-Tmin）/（Tmax+Tmin）×100% |
| Evaporation Distance | 450mm~550mm adjustable |
| Sample Temperature Control | Single heating mode: room temperature ~ 300 ℃ adjustable Single water cooling mode: 10~25℃ adjustable Cold and hot dual-temperature mode: 10 ~ 200 ℃ adjustable |
Technical Parameters | |
|---|---|
| Equipment Model | ZCJS500 Magnetron Sputtering Glove Box System |
| Ultimate Vacuum | 5×10-5Pa |
| Pumping Speed | Atmosphere~5×10-4Pa≤15min |
| Sputtering Target | 3 or 4 inch targets,quantity ≤ 3 |
| Sputtering Power Supply | RF/IF Pulse/DC |
| Sample Size | 150×150mm,backward compatible |
| Film Thickness Uniformity | ≤±5% |
| Uniformity Determination | （Tmax-Tmin）/（Tmax+Tmin）×100% |
| Sputtering Distance | 100mm~±30mm adjustable |
| Sample Temperature Control | Single heating mode: room temperature ~ 300 ℃ adjustable Cold and hot dual temperature mode: 10 ~ 200 ℃ adjustable |
