Heterojunction (HJT) solar cell PECVD solution
Product advantage
Low cost, large capacity
Inline process sequence concept; Adjustable for deposition process spacing; Flexible for IN/IP and I/IN/P process sequence
10000WPH capacity based upon M6, compatible with M2-M12
RF+RPS design, RF for process deposition and RPS for self-clean, to make sure every process has its best power range
Affiliate Self-designed high-precision automatic transmission equipment
Relevant description
Jinchen HJT PECVD solution has broken the bottleneck of the development of HJT solar cell manufacturing technology, breaking through the large area PECVD filming process.
Fully possess Independent Intellectual Property Rights
Cooperate with H2GEMINI (Swiss company)
European team assisted on the prototype verification
