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Diffusion / Thermal oxide / Annealing loading - unloading machine

Product features

Maximum capacity up to 16000pcs/h

Can be customized 

Stable operation with specialized precision ceramic suction cups, ceramic top teeth, ceramic side teeth to reduce wafer scratches 

Technical Parameters

Technical ParametersRelated parameters
Capacity8000/11000/16000 pcs/h
Quartz Boat Dimension1000/1200/1600 slots, pitch 2.38mm
Wafer size 166mm-210mm
Suitable cassette100 cassette
Fragmentation rate≤0.03%
Uptime≥98%
Air consumption1000L/min
The specific parameters are subject to change without notice.
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